If  i don't know false, it should be AuGe Alloy that annealed 1 minute  at
480 oC using rapit thermal processor....

Best Regards.

Tolga YELBOGA
Project Engineer
Nanotechnology Researh Center
Bilkent University
Bilkent, Ankara 06800 TURKEY
Voice: 90-312-290-1020
http://www.nanointurkey.com
http://www.nanotam.bilkent.edu.tr

-----Original Message-----
From: vaibhav mathur [mailto:[email protected]]
Sent: Thursday, April 10, 2008 8:35 AM
To: [email protected]
Subject: [mems-talk] n-type AlGaAs ohmic contacts

hi all,

can someone please suggest the optimum metal sequence and annealing recipe
to form ohmic contacts directly on n-type AlGaAs?

regards
Vaibhav Mathur
PHOTONICS CENTER
UMass,Lowell