Moshe

Can you use an adhesion layer? Ti or Cr without breaking the vacuum between
the two layers? If not, it's tough. You will have to either evaporate with
very high substrate temperature or roughen the surface.

Shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Moshe
Sent: Thursday, May 01, 2008 7:14 AM
To: [email protected]
Subject: [mems-talk] Gold evaporation coating on silicon.

Hello

I want to coat silicon with evaporation coating, and to assurance that the
adhesion between the two materials  will be optimal.
What will be  the optimal treatment to achieve adhesion ?