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MEMSnet Home: MEMS-Talk: SU-8 structure using wet etching
SU-8 structure using wet etching
2008-05-06
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2008-05-06
Michael Larsson
2008-05-07
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SU-8 structure using wet etching
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2008-05-07
Hi Michael

Thank you for your suggestions and providing references. If you have the SEM
other than published in your papers, please send.Do you have any experinece of
SU-8 peeling off if the KOH etching is performed at temperature lower than 60 C.

Best regards

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