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MEMSnet Home: MEMS-Talk: Material for capping a SU8-2050 Microfluidic Opto-BioChip
Material for capping a SU8-2050 Microfluidic Opto-BioChip
2008-05-09
seyeda@ualberta.ca
Material for capping a SU8-2050 Microfluidic Opto-BioChip
2008-05-10
samira aghaei
Material for capping a SU8-2050 Microfluidic Opto-BioChip
2008-05-12
Oakes Garrett
2008-05-12
eowin rohan
Material for capping a SU8-2050Microfluidic Opto-BioChip
2008-05-13
Oakes Garrett
Material for capping a SU8-2050 Microfluidic Opto-BioChip
samira aghaei
2008-05-10
I have a problem in simulating RF mems switch in ansys.
please mail me an example in ansys.
thanks so much.


On 5/10/08, seyeda@ualberta.ca  wrote:
>
> Hi all,
>
> I have made a microfluidic Opto-Biochip in SU8 2050 on a glass substrate.
> Now I need to cap this with another optically clear material such as glass,
> PDMS, PMMA or any other material that may do the job. Up to now we haven't
> had success in bonding any of these materials to SU8 after post exposure
> bake. Does anybody know a material and the process that may work as a cap
> for SU8 chip.
>
> Suggestions are greatly appreciated.
reply
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