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MEMSnet Home: MEMS-Talk: Gold evaporation coating on silicon - thermal treatment for adhesion
Gold evaporation coating on silicon - thermal treatment for adhesion
2008-05-10
Moshe
Gold evaporation coating on silicon - thermal treatment for adhesion
2008-05-12
Suraj Patil
Gold evaporation coating on silicon - thermal treatmentfor adhesion
2008-05-12
Brubaker Chad
Gold evaporation coating on silicon - thermal treatment for adhesion
Suraj Patil
2008-05-12
Hi Moshe,

I dont know how much it would help you, but if I understand it right,
you should be looking into the binary system of Au-Si. You should have
the temperature close to or lower than eutectic point of the Au-Si
system.So that underneath Si layer (few nanometers) diffuses into Au.
I would suggest N2 environment should be fine for this. Shortest time
to start trying would be 10 minutes.

Hope this helps.

Regards,
Suraj Patil
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