I fully agree with this concept.  The new SU-8 layer should cross link
right into the existing structure of the microfluidic structure wafer.
Also, the new SU-8 coating should make an extremely compliant layer to
deal with surface roughness, bow, warp, height differences, etc. and it
would seem that our colleague in Alberta already has all of the
necessary hardware for casting the SU-8 (though I would recommend
something thinner than 2050).

Best Regards,
Garrett Oakes


-----Original Message-----
From: eowin rohan [mailto:[email protected]]
Sent: Monday, May 12, 2008 7:39 AM
To: General MEMS discussion
Subject: Re: [mems-talk] Material for capping a SU8-2050Microfluidic
Opto-BioChip

Hi,

Garret is right, an UV adhesive should work fine, but
you could even try with a new SU-8 layer: spin coat
SU-8 on the substrate cap (glass, PC,...), do the soft
bake and put the cap over your device with the SU-8
layer in contact with your device, expose it to UV and
finally do the hard bake again, you will get a nice
transparent cap.