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MEMSnet Home: MEMS-Talk: ITO with phosphoric acid
ITO with phosphoric acid
2008-05-15
Sandip Agarwal
ITO with phosphoric acid
Sandip Agarwal
2008-05-15
Hello everyone,

Does anyone know the etching reaction of ITO with concentrated
phosphoric acid (85% in water)? More specifically, does the reaction
release any gas?

Thanks,

Sandip

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