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MEMSnet Home: MEMS-Talk: Thick PR
Thick PR
1998-02-15
Myung-Kwon Koo
Thick PR
Myung-Kwon Koo
1998-02-15
I have tried to make 5um thick PR as sacrificial layer.
But big shrinkage & roughness occured baking smaple in conventional
oven for another layer deposition. So, we tried anthor baking method
,UV curing. we had good enough results of smoothness, which is not
the best,I think. The better condition or perfect smoothness should
be challenged.

Dose anyone give me recommendation for better results ?


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