Hi all
For one of my projects, I need to create some deep holes in a Quartz wafer.
I wonder if anybody has experience with etching quartz wafer for >100um
depth? Thanks a lot.
Best
Leo
--
Xiaoguang "Leo" Liu
Birck Nanotechnology Center,
Purdue University,
1205 W.State Street, West Lafayette, IN, 47906 USA
[email protected]
