hello, colleague
It might be silly question to somebody.

but I think it's impossible.

Is there anybody who try to deposit some film at very low temperature.

In PECVD plasma usually occur a little high temp because mobility of
   electrons are better as temperature higher.

I think it'll possible ,if there is something to break the eletron orbit
  from nuclear.

If there is anybody to make a new process , would you join me and
  make revolution.

with thanks.