Dear Mr Ma Bin,
Check out the articles written by Pontus Eriksson and Göran Stemme between
'94 and '96. They made bolometers using tSi3N4 on polyimide. Search in
JMEMS and Sensors and Materials.
Wouter van der Wijngaart
Kungl. Tekniska Högskolan       Tel:    +46 - (0)8 - 790 66 13
S3, Elektrisk mätteknik Fax:    +46 - (0)8 - 10 08 58
100 44  Stockholm               Minicall:       +46 - (0)740 - 26 71 28
Sweden                  e-mail: wouter@s3.kth.se
http://www.s3.kth.se/instrlab/staff/wouterw.html