I am looking for the dielectric constant and breakdown field strength of
silicon nitride, as used in the MUMPS process. (I already looked in the
table of material properties)

Thanks,
John Neumann
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Dr. John Neumann
Postdoctoral Researcher, ECE Dept.
2124 Hamerschlag Hall
Carnegie Mellon University
Pittsburgh, PA 15213-3890

jneumann@ece.cmu.edu
phone: (412) 268-6642
FAX: (412) 268-2860