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MEMSnet Home: MEMS-Talk: Ohmic contact on silicon with antimony contamination
Ohmic contact on silicon with antimony contamination
2008-06-13
Moshe
Ohmic contact on silicon with antimony contamination
Moshe
2008-06-13
Hello

How I can get ohmic contact?

I talk about N type silicon with antimony contamination.
What the optimal metal and the process  to get ohmic contact between the metal
and the silicon ?

Thank You

reply
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