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MEMSnet Home: MEMS-Talk: Wet release tool for MEMS
Wet release tool for MEMS
2008-06-13
Du Bois Bert
Wet release tool for MEMS
Du Bois Bert
2008-06-13
Dear,

I am looking for a wet release tool (mainly for HF) before going to the
superctitical CO2 dryer.
So in the tool, I would be able to etch with HF, rinse with H2O and IPA
without that the wafer goes out of the liquid during the whole process.
Does anybody has any idea where I can find a tool like this?

Regards,
Bert Du Bois
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