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MEMSnet Home: MEMS-Talk: low viscosity and thermal(<130C)/UV curable dielectric materail
low viscosity and thermal(<130C)/UV curable dielectric materail
2008-06-21
Bong Hwan KIM
low viscosity and thermal(<130C)/UV curable dielectric materail
Bong Hwan KIM
2008-06-21
Hi all

I have been studying on dielectric materials for membrane. Can anyone
recommend dielectrics for me?
Thickness : 1~2um, Low viscosity < 50 cst, thermal cure temp < 130C,
resistance to chemical(acetone, IPA, methanol, PR developer & remover, Au &
Al etchant),

Charles
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