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MEMSnet Home: MEMS-Talk: Ebeam evaporation of Silicon Nitride
Ebeam evaporation of Silicon Nitride
2008-07-16
Dave
2008-07-17
SEBESTA Edward
2008-07-17
Gord Wang
Ebeam evaporation of Silicon Nitride
Dave
2008-07-16
Hello,

I am looking to deposit an insulating, optically clear, layer for some
circuitry, and was wondering if I could Ebeam evaporate Silicon nitride?
Also, if I can, I saw something about alpha and beta forms, is there any
substantial difference when dealing with the insulating properties?

Thanks,
David Casale
Drexel University
reply
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