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MEMSnet Home: MEMS-Talk: about wet etching zirconium oxide
about wet etching zirconium oxide
2008-07-31
onny setya
about wet etching zirconium oxide
onny setya
2008-07-31
Dear everyone
I ´d like to try etch ZrOx using HF based solution, has anyone tried to use
50:1:1 water:HF:HNO3 for that purpose?and how was the etch rate? in 2 min at
room temperature I didnot get a significant result, maybe it was too short?
Thank you for helping me!
-onnys-
reply
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