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MEMSnet Home: MEMS-Talk: Si DRIE foundry
Si DRIE foundry
2008-08-06
Prashanth Makaram
Si DRIE foundry
Prashanth Makaram
2008-08-06
Hi,
we are a small startup in France and we are trying to do a backside
plasma etch with an aspect ratio of 1:10 on 200 mm silicon wafers. We
also need to align these trenches with patterns on the front side of the
wafer.  I woudl appreciate if you could point us to some foundries that
would take up this lithography and etching process. Can you also give me
a cost estimate on this process.
thanks
prashanth
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