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MEMSnet Home: MEMS-Talk: Wet etching thickness technique with smooth surface
Wet etching thickness technique with smooth surface
2008-08-16
Moshe
2008-08-17
Andrea Mazzolari
2008-08-19
P.E.M. Kuijpers
2008-08-19
Moshe
Wet etching thickness technique with smooth surface
Andrea Mazzolari
2008-08-17
Which is wafer orientation ?
Andrea

> Hello
> When I operate wet etch to thick silicon wafer I get like scratches on the
> surface.
> I am locking for technique to get smooth surface on silicon wafer when I
> operate wet etch.
> The wafer is without any mask.
> Thank You
reply
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