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MEMSnet Home: MEMS-Talk: Pt RIE ?
Pt RIE ?
1998-02-17
Seung Hwan YI
Pt RIE ?
Seung Hwan YI
1998-02-17
Dear, Members
>
>  Does anyone knows where can I etch the platinum thin film( about 100 ~
>  150 nm ) by RIE ?
>  Is there any foundry services ?
>
>  Thanks
>
>  Seung Hwan YI


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