A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Thinning silicon wafer <100> by wet etching
Thinning silicon wafer <100> by wet etching
2008-08-22
Moshe
2008-08-23
Shao Guocheng
2008-08-23
Moshe
Thinning silicon wafer <100> by wet etching
2008-08-25
Sarosh Khwaja
2008-08-25
Andrea Mazzolari
Thinning silicon wafer <100> by wet etching
Moshe
2008-08-22
> Hello
> When I operate wet etch to thin silicon wafer I get like
> scratches on the surface.
> I am locking for technique to get smooth surface on the silicon
> wafer when I operate thinning by wet etch .
> The wafer is without any mask.
> Thank You



reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
MEMStaff Inc.
Process Variations in Microsystems Manufacturing
Addison Engineering