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MEMSnet Home: MEMS-Talk: Positive Resist Development Mechanism
Positive Resist Development Mechanism
2008-09-02
[email protected]
2008-09-03
Brad Cantos
2008-09-04
Richard B. Keithley
2008-09-04
[email protected]
2008-09-03
Shay Kaplan
2008-09-03
[email protected]
2008-09-03
Bill Moffat
2008-09-04
[email protected]
2008-09-04
Brad Cantos
Positive Resist Development Mechanism
Brad Cantos
2008-09-03
Have you tried doing a brief descum or surface plasma etch prior to
developing?  In the past when I used an iodine solution to etch
electroplated gold this usually helped.

Brad Cantos


On 9/2/08 3:44 PM, "[email protected]"  wrote:

>       I did some research on positive resist development but could not find
> any literature that shows what the development mechanism is of the
> indene-carboxylic acid photoproduct.  Am I to assume that it's a straight
> redox reaction (we use NaOH for our developer) producing a soluble salt
> by-product and water?
>
>       On a related note, I am trying to develop a flood expose and develop
> strip system to remove photoresist (using a mercury arc lamp as an exposure
> source and our current developer to strip).  It worked well in the initial
> stages, but now we are getting some residue which seems to be a result of
> the photoresist being affected by other wet processes involving
> permanganate and/or iodine.  Would increasing NaOH concenration help
> dissolve the resist?  Your thoughts are appreciated.
>
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