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MEMSnet Home: MEMS-Talk: nanohole reducing using the metal thin film deposition
nanohole reducing using the metal thin film deposition
2008-09-04
li shifeng
2008-09-04
SEBESTA Edward
nanohole reducing using the metal thin film deposition
li shifeng
2008-09-04
Hi, I etched 40nm hole arrays on the 15 nm thick silicon membrane. I plan to
deposit 10-20nm metal on the membrane. I am just wondering the final hole array
diameter after the metal deposition.

 Thanks! dlee
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