A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Under what conditions is buffered-HF (BOE) etching diffusion limited?
Under what conditions is buffered-HF (BOE) etching diffusion limited?
2008-09-15
Ken Healy
2008-09-15
Shay Kaplan
2008-09-15
Koray Karakaya
2008-09-16
Ken Healy
Under what conditions is buffered-HF (BOE) etching diffusion limited?
Koray Karakaya
2008-09-15
Hi Ken,

If surfactants don't solve your problem try increasing BOE bath temperature
(~60 C)

Koray

On Mon, Sep 15, 2008 at 6:48 PM, Shay Kaplan  wrote:

> Are you using BOE with surfactant?
>
> Shay
>
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
Nano-Master, Inc.
MEMS Technology Review
Process Variations in Microsystems Manufacturing