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MEMSnet Home: MEMS-Talk: Oxygen plasma
Oxygen plasma
2008-09-17
김태진
2008-09-17
Bill Moffat
2008-09-18
jgrogan@seas.upenn.edu
2008-09-18
Bill Moffat
2008-09-18
Alok Verma
Oxygen plasma
김태진
2008-09-17
Hi all!

I'm trying to purchase a new oxygen plasma system for our lab.
The main purpose is to bond PDMS with glass/PDMS, but I'm having trouble in
which type to choose.
I've searched for a few of those out in the internet, but there are some
treatment systems that uses RF power while others use microwave.

There's a big difference between these two types, but I really don't know what
the differences are when coming to bond PDMS.
Can any of you give me a hint on this issue?

Also, the lab I used to be in used an oxygen asher which uses RF, but those seem
to be a little too expensive.
I'd appreciate if you could give me an advice on which type of products are cost
efficient.

I'm planning to use this plasma system only for PDMS bonding only (possibly
photoresist removal experiments as well though...).

Thanks!
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