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MEMSnet Home: MEMS-Talk: Re: Help on Si-Etch Phenomenon.
Re: Help on Si-Etch Phenomenon.
1998-08-31
Jayant Neogi
1998-08-31
Rosemary L. Smith
1998-08-31
Jayant Neogi
1998-08-31
Shuvo Roy
1998-09-16
Alex
Re: Help on Si-Etch Phenomenon.
Rosemary L. Smith
1998-08-31
Amit,
What you are seeing is porous silicon formation on your wafer.
Porous silicon is sometimes formed on p-type silicon in isotropic
etchants, without the aid of electrochemical anodization.

There were several papers published about this type of porous silicon
formation in the early 1980's.  It is more likely to occur on p+ silicon
than p- .  Try decreasing your HF concentration... that is probabaly what
happens when you use ascetic acid diluent.

--Rosemary Smith
  Professor
  Dept. Electrical & Comp. Engr.
  University of CA, Davis


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