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MEMSnet Home: MEMS-Talk: KOH etch on Si
KOH etch on Si
2008-09-19
Kuijpers, P e m
2008-09-19
Kirt Williams
KOH etch on Si
Kuijpers, P e m
2008-09-19
Hi all,

Can we perform standard KOH etch on highly Sb doped Si wafers?
So we will get the same etch angle of 54.7°?

Thanks

Peter Kuijpers

mailto:[email protected]
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