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MEMSnet Home: MEMS-Talk: piezoresistive accelerometer
piezoresistive accelerometer
2008-09-29
崔金强
2008-09-30
matthew king
2008-10-01
崔金强
2008-10-01
Ravi Shankar
piezoresistive accelerometer
Ravi Shankar
2008-10-01
Hi Jimstrong,

    For designing piezoresistive accelerometer with high sensitivity
and high bandwidth, you can refer the following papers,

   1. "A high-performance micromachined piezoresistive accelerometer
with axially stressed tiny beams", Shusen Huang, Xinxin Li, Zhaohui
Song, Yuelin Wang, Heng Yang, Lufeng Che and Jiwei Jiao,  J.
Micromech. Microeng. 15 No 5 (May 2005) 993-1000.

  2. "High-performance monolithic triaxial piezoresistive shock
accelerometers",  Sensors and Actuators A: Physical, Volume 141, Issue
2, 15 February 2008, Pages 339-346, Peitao Dong, Xinxin Li, Heng Yang,
Haifei Bao, Wei Zhou, Shengyi Li, Songlin Feng.

    I hope this will help you...

Best regards,
A. Ravi sankar,
Senior Research Scholar,
Microelectronics lab,
Electronics and ECE Department,
IIT, Kharagpur - 721302,
India.
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