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MEMSnet Home: MEMS-Talk: OmniCoat baking question
OmniCoat baking question
2008-10-01
Don Friedrich
2008-10-01
SEBESTA Edward
2008-10-01
Gary Hillman
OmniCoat baking question
Don Friedrich
2008-10-01
I am seeking a baking process for OmniCoat which is lower T and slower
ramp than recommended by MicroChem.  The recommended procedure of 200C
for 1 minute breaks my glass wafers.  I would appreciate knowing how
others have baked OmniCoat at lower temperatures, such as 120C.

Thank you.

Don Friedrich
JDSU - Advanced Optical Technologies
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