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MEMSnet Home: MEMS-Talk: OmniCoat baking question
OmniCoat baking question
2008-10-01
Don Friedrich
2008-10-01
SEBESTA Edward
2008-10-01
Gary Hillman
OmniCoat baking question
Gary Hillman
2008-10-01
What is the character of the glass. If it is soda lime, it must be heated
very uniformly or POW!!!.  Which is why Corning developed pyrex about 100
years ago.  If it is Borosilicate (pyrex) or quartz (vycor or similiar)
then it should not be a problem.  Gary

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Don Friedrich
Sent: Wednesday, October 01, 2008 1:15 PM
To: [email protected]
Subject: [mems-talk] OmniCoat baking question


I am seeking a baking process for OmniCoat which is lower T and slower
ramp than recommended by MicroChem.  The recommended procedure of 200C
for 1 minute breaks my glass wafers.  I would appreciate knowing how
others have baked OmniCoat at lower temperatures, such as 120C.

Thank you.

Don Friedrich
JDSU - Advanced Optical Technologies
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