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MEMSnet Home: MEMS-Talk: wafer bow spec
wafer bow spec
2008-10-01
John-Rolf Oakley
2008-10-02
Laura Malatto
2008-10-02
jeff besterman
2008-10-02
Ken Smth
2008-10-03
Laura Malatto
wafer bow spec
John-Rolf Oakley
2008-10-01
Hello,

I am having trouble keeping vacuum on some wafers and I was wondering if anyone
could tell me what the SEMI standard for wafer bow is on 6", 675um, single flat,
single side polished, <100>, P type Si?

Thanks
reply
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