I need a good textbook on contact/proximity photolithography with a
focus on both theory and partical equipment issues.

I have quite a few lithography books, but they are focused on projection
printing such as steppers.

I have all three of Dave Elliot photolithography books, and Helbert's
book and I proofread Levinson's book, but they only mention, if they
mention at all, contact/proximity lithograph in passing.

I am running resolution tests on my contact/proximity tools and getting
interesting results and would like to understand them better. In
particular across the wafer variation in resolution.

If a book is not available, technical papers would be fine also.


Edward H. Sebesta