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MEMSnet Home: MEMS-Talk: wafer bow spec
wafer bow spec
2008-10-01
John-Rolf Oakley
2008-10-02
Laura Malatto
2008-10-02
jeff besterman
2008-10-02
Ken Smth
2008-10-03
Laura Malatto
wafer bow spec
Laura Malatto
2008-10-03
Me too!
sorry, was 0.06 mm


jeff besterman escribió:
> Actually, on page 24 of SEMI M1-1106, the bow is listed as maximum 60um and
> not 0.06um.  I'd be interested in getting wafers with a bow as low as ..06um.
>
reply
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