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MEMSnet Home: MEMS-Talk: HF vapor etching
HF vapor etching
2008-10-07
Barbara Cortese
2008-10-08
Le Cao Hoai Nam
2008-10-08
Morten Aarøe
HF vapor etching
Barbara Cortese
2008-10-07
Hi all

I'm interested in HF vapour etching. Could someone suggest a good recipe or some
references?
I'm also looking for HF/methanol mixture vapour etching.

Thanks
Barbara

reply
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