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MEMSnet Home: MEMS-Talk: Heidenhain plates and similar things for gap measurement tools
Heidenhain plates and similar things for gap measurement tools
2008-10-07
SEBESTA Edward
Heidenhain plates and similar things for gap measurement tools
SEBESTA Edward
2008-10-07
I wish to be able to measure and check independently the gap for my
proximity exposures. I understand that gap measurement tools are made
with Heidenhain plates and other other metrology plates.

Does anyone know of any third party vendors who make gap measurement
tools for proximity exposure tools?

I want to check and control the proximity gap on my exposure tools and
do independent check of the tool's gap.

Ed
reply
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