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MEMSnet Home: MEMS-Talk: light type and intensity for a clean room lithography area
light type and intensity for a clean room lithography area
2008-10-15
Laura Oropeza Ramos
2008-10-15
SEBESTA Edward
2008-10-15
Bill Moffat
2008-10-16
eowin rohan
light type and intensity for a clean room lithography area
2008-10-16
Shay Kaplan
light type and intensity for a clean room lithography area
eowin rohan
2008-10-16
Hello Laura,

Bill and Ed are right, I don´t know any standard, and usually yellow filters are
enough. The only thing I can add to their answers is that there are comercial
fluorescent tubes with a yellow filter inside, in fact a plastic coat around the
normal tube, this kind of tubes perhaps are easier to handle.

Regards
Eowin

--- Den ons 2008-10-15 skrev Laura Oropeza Ramos :
Från: Laura Oropeza Ramos 
Ämne: [mems-talk] light type and intensity for a clean room lithography area
Till: [email protected]
Datum: onsdag 15 oktober 2008 18.29

Hello all,

We are planning the construction of a clean room for MEMS polymer
fabrication in Mexico City. I can not find information about if there is a
standard way to determine the yellow light intensity in the lithography
clean room areas. If somebody could give me an advice on this, it would be
highly appreciated.

Thanks so much

Laura A. Oropeza Ramos, Ph.D.
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