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Fox12 resist
2008-10-21
Paolo Bondavalli
Fox12 resist
Paolo Bondavalli
2008-10-21
Dear members,

We received Fox12 resist (negative resist HSQ for e-beam) a week ago. We
stored it at 8°C.  We let the bottle in ambient air only during a few
hours when we spincoat the resist. Today, the phase of the resist seems
to have changed, looking like jam. We don't understand what happens, is
it due to the repeated variation of temperature? How do you preconise to
store the resist?

Thank a lot

Paolo Bondavalli
Nanocarb Lab.
Equipe mixte Ecole Polytechnique/Thales
THALES RESEARCH AND TECHNOLOGY
Route Departementale 128
F91767 Palaiseau Cedex
(FRANCE)
Tel : 01 69 41 58 83
Fax : 01 69 41 57 38
Email : [email protected]
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