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MEMSnet Home: MEMS-Talk: Re: Ultra-clean wafer shipping containers
Re: Ultra-clean wafer shipping containers
1998-09-14
Armin Kuebelbeck
Re: Ultra-clean wafer shipping containers
Armin Kuebelbeck
1998-09-14
Particles is no problem in that way you ship the wafers, but organic
contamination due to organic monomers / oligomers outgassing from the
plastics is ALWAYS present. There is only one way to get rid of these
organic layers: CLEANING e.g. with Sulfuric Acid + H2O2 (4:1) =Piranha
or Ammonia + H2O2 and Water (1:1:5) = SC1.
A slight plasma treatment will also remove organics, but will add lots
of particles.

Sorry, I see no other way.

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