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MEMSnet Home: MEMS-Talk: Smelly Wafers
Smelly Wafers
2008-11-07
Nicolas Duarte
2008-11-07
SEBESTA Edward
2008-11-07
shay kaplan
2008-11-07
Oakes Garrett
2008-11-10
Nicolas Duarte
Smelly Wafers
Nicolas Duarte
2008-11-07
I just started a new job where, after an HF etch to remove phosphor
glass, the wafers have a pungent garlic smell to them.  I asked my
coworkers about this and they said it was "normal," but I have never
encountered a wafer that had a scent.  It has been my experience that
where there is smell there is a contaminant so I was wondering if
anyone know what the potential source of this smell may be.

Nicolas Duarte
reply
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