Hi Nicolas,

My recommendation is using a Epoxy-material with spacer. Spacer are cylindrical
particles (normally parts of glass fibres) diameters accuracy is very high.
After pressing both parts together spacer will orientate themself and will form
a very accurate distance beween both planes. Tolerance is less than +/- 3µm (we
have had used diameter of 5µm and had distance between 4.75 and 5.08).

Regards,

Bernd Krüger
Productdevelopment
Draloric/Beyschlag Resistors Division

Tel.: +49 481 95-255
Fax: +49 481 95-208

E-mail: [email protected]
Homepage: http://www.vishay.com

VISHAY BCcomponents BEYSCHLAG GmbH
Rungholtstr. 8-10, D-25746 Heide

Amtsgericht/County Court Pinneberg HR B 1508 ME
Geschäftsführer/Managing Directors: Stephan Höllerl, Werner Gebhardt, Frank
Kabbe


-----Ursprüngliche Nachricht-----
Von: [email protected] [mailto:[email protected]] Im
Auftrag von Nicolas Vergauwe
Gesendet: Mittwoch, 12. November 2008 09:43
An: [email protected]
Betreff: [mems-talk] Spacer material

Hi everyone,

Could you suggest me a spacer material for separating two (horizontal) glass
plates? The spacer should have a thickness of 100 µm, but more importantly,
the thickness tolerance should be as low as possible. Also, the spacer needs
to be fixed manually on the glass plate: it cannot be processed on the glass
plate but it has to be attached afterwards.

I thought of using a thin metal sheet and then glue it to the glass plate,
but I don't know if it will be the best way.

Any help or ideas are welcome!

Nicolas