Hi,
sputtering tungsten is surely the choice. If you can adjust stress you even can
leave the adhesion layer and get working results.
Regards,
lumina
-----Ursprüngliche Nachricht-----
Von: [email protected] [mailto:[email protected]] Im
Auftrag von Pothisorn, Araya - potay006
Gesendet: Freitag, 10. Oktober 2008 05:42
An: [email protected]
Betreff: [mems-talk] How to deposit Tungsten blanket on Oxide layer
Hi all,
I'm new in MEMS. Does anyone have experience in deposit tungsten on
Oxide layer? I need to deposit 1000 angstorm of tungsten blanket on the
oxide layer.
Regards,
Araya
