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MEMSnet Home: MEMS-Talk: Cu electroplating uniformity problem
Cu electroplating uniformity problem
2008-11-18
Denis Petrov
2008-11-18
Robert Bock
2008-11-18
李加东
2008-11-19
Shay Kaplan
2008-11-19
Kuijpers, P e m
Cu electroplating uniformity problem
Shay Kaplan
2008-11-19
 Are these conditions dependent on the plating solution composition?

Shay?

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of ???
Sent: Wednesday, November 19, 2008 1:51 AM
To: [email protected]
Subject: Re: [mems-talk] Cu electroplating uniformity problem

My research is about the uniformity control of electroplating.

There's one conclusion of my research paper:

The uniformity and profiles of electroplated nickel posts are controlled
mainly by plating current density and temperature. Optimal conditions of
8.05mA/cm2 and 20°C were obtained to fabricate flat cross-sectional profile
microstructures and a uniform thickness distribution across a specimen.
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