A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Ti and Ni wet etching in HF
Ti and Ni wet etching in HF
2008-11-17
ANIRBAN SARKAR
2008-11-21
汪飞
2008-11-21
ANIRBAN SARKAR
2008-11-22
Jie Zou
2008-11-23
ANIRBAN SARKAR
anisotropic Ni etching
2008-11-23
Maria Matschuk
2008-11-24
Kvel Bergtatt
2008-12-03
Lou Chomas
2008-11-28
汪飞
2008-11-28
汪飞
2008-11-24
Samadhan B. Patil
2008-11-24
walter
2008-11-27
saravan kallempudi
Ti and Ni wet etching in HF
Jie Zou
2008-11-22
Try some Ni etchants. I have one (Ni etchant TFB.
http://microfabrication.colorado.edu/equipment/pdf%20files/ni_etchant.pdf)
in my lab. It will not attack the glass, but I'm not sure how it performs
for Ti.

HF would definitely kill your glass substrate.

Jie

2008/11/21 ANIRBAN SARKAR 

> Yes! I'm talking about the glass wafer. Yes it is absolutely correct that
> HF
> is extremely difficult to deal with glass substrates. Besides, the etching
> of Nickel is extremely slow in HF as I have mentioned. So I am trying to
> search out an ambient etchant for etching out out both Ni and Ti.
>
> Your comment is highly appreciated.
>
> Anirban

****************************************************
*  Zou Jie (Jay)
*  Department of Physics
*  University of Florida
*  Tel: +1-352-846-8018
*  Email: [email protected]
*  Homepage: http://plaza.ufl.edu/zoujie/
****************************************************
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
Nano-Master, Inc.
MEMS Technology Review
Process Variations in Microsystems Manufacturing