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MEMSnet Home: MEMS-Talk: anisotropic Ni etching
Ti and Ni wet etching in HF
2008-11-17
ANIRBAN SARKAR
2008-11-21
汪飞
2008-11-21
ANIRBAN SARKAR
2008-11-22
Jie Zou
2008-11-23
ANIRBAN SARKAR
anisotropic Ni etching
2008-11-23
Maria Matschuk
2008-11-24
Kvel Bergtatt
2008-12-03
Lou Chomas
2008-11-28
汪飞
2008-11-28
汪飞
2008-11-24
Samadhan B. Patil
2008-11-24
walter
2008-11-27
saravan kallempudi
anisotropic Ni etching
Kvel Bergtatt
2008-11-24
try Hot SC1 or Hot Sulfuric.

On Sun, Nov 23, 2008 at 2:40 PM, Maria.Matschuk@nanotech.dtu.dk wrote:

> Dear all,
>
> I also need to etch nickel but I would need to have an anisotroic etch to
> achieve high aspect ratios (at least higher than 1). Is there a dry or wet
> etch process?
>
> Kind Regards
> Maria

--
_fm
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