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MEMSnet Home: MEMS-Talk: Surface plannerization
Surface plannerization
2009-01-07
abhaya joshi
Surface plannerization
abhaya joshi
2009-01-07
hi all

i am having 30-40 um depth cavities on N type <100> silicon wafer. i am
looking for planner surface coating of photoresist, which can fill the the
cavities and leave the surface coating in plane.
Does any one know about which phtoresist will be suitable for this
application or what will be the process?

-abhay joshi,
university of Pune,
India.
reply
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