A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: XeF2 source
XeF2 source
2009-01-07
Taekyung Kim
2009-01-07
David Springer
XeF2 source
Taekyung Kim
2009-01-07
 Hi all,

I am wondering if anybody knows a XeF2 source vendor.
I'd like to build a XeF2 etching system in my lab, but I can't find a vendor
of XeF2 source.

Thank you very much in advance.

TK
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
Mentor Graphics Corporation
University Wafer
Tanner EDA by Mentor Graphics