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MEMSnet Home: MEMS-Talk: XeF2 source
XeF2 source
2009-01-07
Taekyung Kim
2009-01-07
David Springer
XeF2 source
David Springer
2009-01-07
Hello Taekyng

When you say an XeF2 source are you talking about a cylinder of XeF2 or
something more complicated?  If you look on our web site
http://www.xactix.com/suppliers.htm there is a list of suppliers of XeF2.

David Springer
XACTIX, Inc.
2403 Sidney St.
Suite 300
Pittsburgh, PA 15203
Tel: 412 381 1395
Fax: 412 381 1136
email: [email protected]

> Hi all,
> I am wondering if anybody knows a XeF2 source vendor.
> I'd like to build a XeF2 etching system in my lab, but I can't find a vendor
> of XeF2 source.
reply
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