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MEMSnet Home: MEMS-Talk: Vanadium Oxide
Vanadium Oxide
2009-01-15
James Paul Grant
2009-01-15
Dirk.DeBruyker@parc.com
2009-01-16
James Paul Grant
2009-01-22
Dirk.DeBruyker@parc.com
2009-02-09
James Paul Grant
2009-02-09
Dirk.DeBruyker@parc.com
Vanadium Oxide
James Paul Grant
2009-01-15
Hello I'm interested in fabricating a microbolometer electromagnetic
radiation detector.

Extensive research shows that vanadium oxide is one of the best
materials to use for such a device.

I'm interested if anyone has information on the deposition and
patterning of  Vanadium Oxide.

Any advice much appreciated.

Many thanks,

Dr. James Paul Grant
Postdoctoral Research Associate
Microsystems Technology Group
76 Oakfield Avenue Room 3
University of Glasgow
Glasgow
Scotland
G12 8LS
Telephone: +44(0)141 330 3374

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