I was thinking the same thing.  Surface prep is usually the main cause
of adhesion problems.

Dan

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of shay kaplan
Sent: Friday, January 16, 2009 5:39 AM
To: [email protected]; 'General MEMS discussion'
Subject: Re: [mems-talk] Adhesion on Alumina

Evelyn
How are you preparing the substrate surface before evap?
Shay