Evelyn, it would seem to me that the Ti seed layer might be oxidized and
therefore the upper metal layers aren't sticking.  Is the surface discolored
by Ti and the metal above lifting off.  Gary

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of shay kaplan
Sent: Friday, January 16, 2009 8:39 AM
To: [email protected]; 'General MEMS discussion'
Subject: Re: [mems-talk] Adhesion on Alumina


Evelyn
How are you preparing the substrate surface before evap?
Shay